Conference room: SAMUM, 5^th floor

8:30 – 16:30

SVC Tutorial Course:

“Application of Reactive Sputtering”

Instructors: Ralf Bandorf and Holger Gerdes

Fraunhofer Institute for Surface Engineering and Thin Films

Braunschweig, Germany

8:30 – 10:30

Part I

10:30 – 10:50

Coffee break

10:50 – 12:50

Part II

12:50 – 14:00

Break

16:00 – 16:30

Part III

15.00 – Registration of Symposium participants

18.00 –

Get together - Hotel restaurant PERMARE, ground floor

7.30 – 9.00

Breakfast

Session A - Conference room ORKAN, ground floor

Session Chair: Witold Gulbinski

9:30 – 9:40

Opening of the Symposium - welcome addresses

9:40– 10:00

Rudolf Jaeckel Award Ceremony

Chair: Michael Kopnarski,

President of the DVG

Laudation and presentation

of the Rudolf Jaeckel-Prize 2015

of the German Vacuum Society

to Professor Dr. Franz Giessibl

10:00 – 10:30

DVG – Lecture of the laureate – Franz J. Giessibl

New frontiers of atomic force microscopy from vacuum to ambient condition

10.30 – 10:50

Coffee break

10:50 – 11:20

INV1 – Holger Gerdes, R. Bandorf, M. Vergöhl, G. Bräuer,

Reactive HIPIMS: challenges and industrial solutions

11:20 – 11:40

O1 – W. Gajewski, P. Lesiuk, K. Ruda, M. Żelechowski, P. Ozimek,

Power supply technology for cutting-edge plasma applications

11:40 – 12:00

O2 – T. Leyendecker, Ch. Schiffers, Advances in deposition equipment and process technology for HIPIMS coatings for cutting tools

12:00 – 12:20

O3 – P. Malinovskis, J. Palisaitis, Per O. Å. Persson, E. Lewin, U. Jansson, Synthesis and characterisation of MeB_x (Me=Cr, Nb, Mo) thin films by non-reactive dc magnetron sputtering

12:20 – 12:40

O4 – D. Bociąga, M. Kamińska, A. Sobczyk-Guzenda, K. Jastrzębski, L. Świątek, A. Olejnik, Surface properties and biological evaluation of SiDLC films fabricated by a multi-target DC-RF magnetron sputtering

13.00 – 14.00

Lunch

Session B - Conference room ORKAN, ground floor

Session Chair: Michael Kopnarski, Krzysztof Zdunek

15.00 – 15.30

INV2 – Allan Matthews, A perspective on developments in plasma assisted PVD processes

15.30 – 15.50

O5 – A. Bartnik T. Pisarczyk, P. Wachulak, T. Chodukowski, T. Fok, Ł. Węgrzyński, Z.Kalinowska, H. Fiedorowicz, R. Jarocki, J. Kostecki, W. Skrzeczanowski, A. Szczurek, M. Szczurek, E.Krousky,M. Pfeifer, J.Skala, J.Ullschmied, J. Dostal, R. Dudzak, J. Hrebicek, T. Medrik, J. Cikhardt, B. Cikhardtova, D. Klir, K. Rezac,

EUV induced low temperature photoionized plasma

15.50– 16.10

O23 – H. Plöchinger, Vacuum Measurement - Pirani Without Zero Pressure

16.10 – 16.30

O7 – K.W. Marszałek, R. Mania, J. Morgiel, Nanocomposite TiN-Si₃N₄ coatings on textiles

16.30 – 16.50

O8– J. Rymarczyk, P. Dłużewski, M. Kozłowski, E. Czerwosz,

Multilayer carbon-palladium films for hydrogen detection

16.50 – 17.10

Coffee break

17.10 – 17.40

INV3 – Sam Zhang, Towards hard yet tough ceramic coatings

17.40– 18.00

O9 – J. Lösch, D. Spriestersbach, A. Brodyanski, E. Kerscher, M. Kopnarski, Crack initiation and propagation in the very high cycle fatigue regime of the high-strength steel 100Cr6: Vacuum experiments as a simulation tool for VHCF failure

18.00 – 18.20

O10 – D. Bociąga, A. Sobczyk-Guzenda, W. Szymanski, A. Jędrzejczak, A. Olejnik, A. Kowal, K. Jastrzębski, Mechanical properties and chemical analysis of Si-incorporated carbon coatings prepared by magnetron sputtering on Ti6Al7Nb substrate, for potential biomedical applications

18.20 – 18.40

O11 – P. Nolbrzak, B. Wendler, Effect of relative humidity of the environment onto tribological properties of nanocomposite low friction coatings

19.30 –

Dinner

7.30 – 9.00 Breakfast

Clausius Session

Educational Programme

Conference room MARINGO (level -1)

Chair: Witold Gulbinski

Presentation of industry exhibitors

Conference room ORKAN

Moderator: Bogdan Warcholiński

10.00 – 10.40

Sam Zhang,

Singapore University (SG)

Transparent Solar Cells for Windows

9.00 – 10.30

• AMP sp. z o.o.

• AP Vacuum sp. z o.o.

• ArtVAC

• EDVAC

• Edwards Vacuum

• FHR

• Hiden Analytical Ltd.

• Prevac

• TEPRO S.A.

• VAT Vacuum Valves AG

10.40 – 11 .20

Holger Kersten,

Kiel University (DE)

The Universe - a world

of plasma

11.25 – 12.00 Coffee/Sandwich break

10.30 – 10.50

Coffee break

BalticNet PlasmaTec Session

Conference room ORKAN

Moderator: Alexander Schwock

10.50 – 11.10

BNPT0 – Alexander Schwock, Katherina Ulrich, BalticNet-PlasmaTec a cluster supporting international cooperation

11.10 – 11.30

BNPT1 – I. Jõgi, J. Raud, Mid-pressure RF discharge for radical production

11.30 – 11.50

BNPT 2 – J. Procelewska, Y. Musayev, Added value trough surface technology

11.50 – 12.10

BNPT 3 – F. Faupel, T. Strunskus, O. Polonsky, M. Elbahri, Plasma deposition of functional nanocomposites

12.10 – 12.30

BNPT 4 – H. Kersten, On the role of the energy influx during plasma- surface processes

13.00 – 14.00

Lunch

Session D - Conference room ORKAN, ground floor

Session Chair: Ewa Dobruchowska

15.00 – 15.30

INV4 – Hana Baránková, L. Bardos, Hollow cathode based plasma sources for reduced and atmosphetic pressures

15.30 – 16.00

INV5 – Christoph Eisenmenger-Sittner, A. Eder, G. H. S. Schmid,

Deposition, characterization and applications of thin films on granular substrates

16.00 – 16.20

O12 – S.Passlack, A.Brodyanski, M.Kopnarski, Fenanoclusters: generation via magnetron sputtering and characterization by SNMS and TEM

16.20 – 16.40

O13 – T. Borowski, A. Brojanowska, B. Adamczyk-Cieślak,

Unprecedented increase of 316l steel corrosion resistance after cathodic cage plasma nitriding and carbonitriding in a sodium chloride solution

16.40 – 17.00

O14 – J. Piwowarczyk, R. Jędrzejewski, K. Kwiatkowski, J. Baranowska, , PTFE thin films obtained by pulsed electron beam deposition and pulsed laser deposition methods

17.00 – 17.20

O15 – A. Schütz, J. Heeg, H. Litschke, M. Wienecke, Adhesive porous DLC-coatings by modified PECVD process

17.20 – 18.00

Coffee break

17.30 – 18.30

Poster Session – Conference room ORKAN, ground floor

Chair: Witold Gulbinski

20.00 –

Conference Dinner sponsored by TEPRO S.A.

7.30 – 9.00

Breakfast

Session F - Conference room MONSOON, 6^th floor

Session Chair: Elżbieta Czerwosz, Bogdan Wendler

9.00 – 9.30

INV6 – Roland Hergenröder, N. Esser, A. Jürgensen,

Photoelectron spectroscopy under reactive conditions

9.30 – 9.50

O17 – I. Firytova-Elkina, A. Chakrabarti, M.R. Nelson, K. V. Esham, Sh. M. Stanley, N. S. Hosmane, S.F. Mitura, Nanocomposite graphene - hexagonal boron nitride

9.50 – 10.10

O18 – B. Lesiak, L. Stobinski, M. Mazurkiewicz, A. Malolepszy, J. Zemek, P. Jiricek, I.Bieloshapka, Chemical and structural surface properties of carbon nanomaterials decorated with Pd – electron spectroscopy and quases analysis

10.10 – 10.30

O19 – J. Heeg, P. Fedtke, A. Schütz, M. Leprich, M.Wienecke,

Graphene nano platelet films at bio implant materials by modification of PECVD process and it’s electrode behaviour

10.30 – 10.50

O20 – K. Nowakowska-Langier, R. Chodun, P. Konarski, K. Sobczak, K. Zdunek, Specific coating/substrate interface formed during coating deposition with the use of modified IPD method

10.50 – 11.10

O21 – M.St. Węglowski, S. Błacha, A. Phillips, Electron beam welding – techniques and trends – a review

11.10 – 11.30

O22 - M. Tacikowski, J. Kamiński, M. Pisarek, K, Rożniatowski, T. Wierzchoń, Improving the performance properties of the PVD produced nitride layers on light alloys using a hydrothermal treatment

11.30-11.50

O23 – M. Pancielejko, A. Czyżniewski, V. Zavaleyev , Optimization of the deposition parameters of Cr/DLC coatings with the modified cathodic vacuum arc method for sintered carbides tools

11.50

Closure of the Symposium

11.55 – 12.30

Coffee break / Sandwich break

12.30 –

Departure of participants

List of posters

P1

Piotr Firek, Izabela Stępińska, Jerzy Kalenik, Mirosław Kozłowski, Elżbieta Czerwosz, Jan Szmidt, Ewa Kowalska

INFLUENCE OF Ti LAYER AND Si SUBSTRATE ON THE PROPERTIES OF THE C-Ni/Ti/Si MULTILAYER

P2

M. Strafela, H. Leiste, K. Seemann H.J. Seifert, S. Ulrich,

INFLUENCE OF THE SUBSTRATE TOPOGRAPHY ON THE CONSTITUTION OF Li-RICH Li-Ni-Mn-Co-O THIN FILM BATTERIES

P3

M. Wilhelmi, T. Radny, R. Schäfer, M. Kopnarski

ENHANCING THE Pt-COATING PROCESS ON ABS BY PLASMA TREATMENT

P4

Kivilcim Koseoglu¹, Irmak Karaduman ¹, Selim ACAR¹, Bahtiyar Salamov^,1,2

ENERGY STORAGE PLASMA ELECTRONIC DEVICES WITH POROUS ZEOLITE CATHODES

P5

F. Haase, D. Lundin, S. Bornholdt, H. Kersten

INCREASED IONIZATION DURING MAGNETRON SPUTTERING

P6

Erik von Wahl, Alexander M. Hinz, Thomas Strunskus, Holger Kersten

ELECTRICAL MEASUREMENTS FOR THE CONTROL OF

NANOPARTICLE GROWTH IN AN ACETYLENE PLASMA

P7

S.Krawczyk, E.Czerwosz, M.Kozłowski, E. Kowalska P. Dłużewski

C/Ni/Pd NANOCOMPOSITE FILMS FOR CO₂ AND NH₃ SENSING

P8

J. Narojczyk, D.Morozow1 Z. Werner, M. Barlak, M. Łagodziński

DURABILITY CHANGES OF COBALT-TUNGSTEN CARBIDE TOOLS AFTER ION IMPLANTATION

P9

J. Rymarczyk, M. Kozlowski, K. Sobczak, E. Czerwosz

ELECTRON MICROSCOPY STUDIES OF C-Pd FILMS

P10

Betiuk M.^,Pokorska I., Gilewicz A. , Warcholiński B.

QUALITY EVALUATION OF HS6-5-2 TOOL STEEL / CrN/CrCN AREOLOGICAL SYSTEMS WITH VARIOUS MODULATION PARAMETER λ USING RECATEST METHOD

P11

V. Zavaleyev, J.Walkowicz, R. Rogowska, A. Zykova, V. Safonov

MODIFICATION OF SURFACE PROPERTIES OF Ta-C COATINGS BY THE SUBSTRATE BIAS VOLTAGE ADJUSTMENT

P12

V. Zavaleyev, J. Walkowicz

INVESTIGATIONS OF CARBON CATHODE SURFACE BEFORE AND AFTER THE PASSAGE OF COMBINED DC VACUUM-ARC WITH SUPERIMPOSED HIGH-CURRENT ARC PULSES

P13

P. Myśliński, A. Gilewicz, Ł. Szparaga, R. Olik, K. Mydłowska, J. Ratajski

THERMOMECHANICAL ANALYSIS OF THE IMPACT OF THE NITRIDING OF STEEL SUBSTRATE ON THE THERMAL STABILITY OF THE SUBSTRATE – CrCN COATING SYSTEMS

P14

P. Myśliński, G .Greczyński, P. Kamasa

THE INFLUENCE OF THE COMPOSTION OF THE TiAlN ANTI-WEAR COATING ON THE COURSE OF THERMOMECHANICAL INTERACTION TO THE SUBSTRATE IN THE FUNCTION OF TEMPEARATURE

P15

L.Skatkov, V.Gomozov

ROLE OF METAL IMPURITIES IN GENERATION OF DEFECTS IN ANODIC COATINGS Nb₂O₅

P16

Yeghiazaryan Artush, Yeghiazaryan Arman

VACUUM PUMPS AND THEIR EFFECTIVE APPLICATIONS

P17

W. Pawlak, A. Rylski, A. Sobczyk-Guzenda, M. Makowka, K. Wlodarczyk-Kowalska, P. Nolbrzak, J. Wozniak, P. Domanowski, W. Satora, S. Owczarek

RHENIUM-BASED COATINGS BY CVD AND PVD TECHNIQUES

P18

P. Ceynowa^,, K. Mitura, M. Dudek, W. Zinka, S. Mitura

PROPERTIES OF THE DETONATION DIAMONDS NANOPOWDER (DND) MODIFIED WITH MW PECVD+R SYSTEM

P19

Artur Wiatrowski¹

THE INFLUENCE OF MAGNETRON DISCHARGE POWER ON THE SINGLE PROBE LANGMUIR MEASUREMENTS AND RESULTED PLASMA PARAMETERS OF TITANIUM SPUTTERING PROCESSES

P20

Katarzyna Włodarczyk-Kowalska, Marcin Makówka, Piotr Nolbrzak, Bogdan Wendler

THE EFFECT OF DEPOSITION METHOD ONTO PROPERTIES OF NANOCOMPOSITE, LOW FRICTION nc-TiC/a-C(:H) COATINGS

P21

S. Fryska, P. Giza, J. Baranowska,

THE NITROGEN STABILIZED AUSTENITE COATINGS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING WITH THE DIFFUSIVE SUB-LAYER

P22

Irmak Karaduman¹, Metin Özer¹, Selim Acar¹

TUNABLE SENSITIVITY UNDER ULTRA-VIOLET LIGHT IRRADIATION FOR ROOM TEMPERATURE NO₂ SENSING

P23

Nizar Jawad Hadi ¹, Dhey Jawad Mohamed ²

The relation between physical and morphological properties of ZnO/waste polystyrene nano fluid

P24

Najim A. Saad ¹, Adwaa Mohammed²

Effect of fibres reinforced on crystallinity and fatigue behaviour of (poly ether ether ketone) composite in aerospace applications